Vacuum Deposition Applications

Vacuum Chamber Deposition

Ultrasonic Technology for Vacuum Vapor Deposition Applications

Sono-Tek UVVD Series ultrasonic nozzle systems are designed to be integrated onto vacuum chambers, provided by the original equipment manufacturer (OEM). The unique UVVD design is proven for integration onto vacuum enclosed platforms for applications such as Polymer Vapor Deposition (PVD) and Metal Organic Chemical Vapor Deposition (MOCVD). The characteristic low velocity atomization created from UVVD series creates a vapor cloud with a tight drop distribution and controlled drop size based upon frequency. Because ultrasonic nozzles operate by converting high frequency sound waves into mechanical vibration, liquid that contacts the nozzle surface is atomized without the addition of air or gas, and therefore the integrity of the vacuum chamber is not diminished during spray. Equipped with a proprietary flow restriction device and choice of KF or CF vacuum flange, integration of the UVVD system is ideal for OEM Vacuum Deposition machine manufacturers (typical vacuum range is 0.1 – 1 torr; 13 – 133 pascal; 0.13 – 1.3 millibar).

The ECHO generator technology integrated into the UVVD Series Systems provides the electrical energy required for atomization and is equipped with an advanced load leveling feature, which adjusts to varying vacuum conditions automatically, maintaining the most stable spray characteristics during the vacuum deposition processes.

UVVD Series ultrasonic spray systems are equipped for high temperature vacuum environments and come with cooling capability and temperature monitoring to ensure proper heat protection.

Benefits for vacuum chamber applications include:

  • Load leveling designed electronics
  • High temp protection and monitoring
  • Unique liquid flow restriction design for vacuum conditions
  • Atomization is created without air/gas, maintaining vacuum integrity

Visit to learn more about what makes ultrasonic nozzles unique and their benefits in spray chamber applications.