A fully automated ultrasonic photoresist coating system featuring integrated robotic wafer handling for precision semiconductor wafer manufacturing. The SPT300WS combines Sono-Tek’s proven ultrasonic spray coating technology with a dual-cassette handling system that automatically loads, aligns, coats, and unloads wafers — delivering consistent, high-uniformity coatings for 100, 150, 200, and optional 300 mm wafers, all without operator intervention.
Visit How Ultrasonic Nozzles Work to learn more about the unique capabilities of ultrasonic spray.
Basic Specifications
| 2 cassette capacity: Supports 100, 150, and 200mm or 300mm wafers |
| Single arm robot: High response brushless motors and precise zero backlash |
| Auto scan of cassettes: Locates and queues wafers to be coated |
| Clean room compatible: Class 1 |
| Robot reliability - MTBF: >60,000 hours |
| Pre-alignment: Automated pre-alignment sequence prior to coating |
| 2-position nozzle rotate: Single or dual nozzle configuration |
System Options
| Post coat heat plate: Automated soft bake process step |
